Sharp EL-6490 Manual de usuario descargar pdf (Pagina 16)

You can analyze crystal orientation on sub-micron areas with an

optional Electron Back Scatter Diffraction (EBSD) detector. JSM-

6490 series SEM provides the best location for this detector.

Specimen: Duplex steel

Ferrite

Oxford EBSD INCA Crystal

Austenite

An EDS, which is capable of analyzing micro areas on a speci-

men, expands the SEM to a solution tool that performs prob-

lem-solving tasks from observation to analysis. The take-off

angle of X-ray is 35 degrees at the analytical working distance

of 10mm. Elemental analysis can be done with high-resolution

observation.

Probe current detector

Out In

Analysis Station Provides High Precision Analysis

The Analysis Station, the analytical SEM(JSM-6490A/JSM-6490LA),

has the energy dispersive X-ray analyzer (EDS) developed by JEOL

in the same footprint as the standard SEM. The SEM and the EDS

are integrated as a single system. The observation and analysis can

be done seamlessly since the EDS analysis can be initiated on the

SEM operation menu. One mouse can run both the SEM and the

EDS operation menus, which are displayed on 2 monitors.

A specimen is mounted by opening the front door of the specimen

chamber. You can add the optional specimen exchange airlock cham-

ber to shorten exchange time.

The specimen chamber is optimized for a variety of detectors includ-

ing EDS, WDS, EBSD based on the concept of “seamless from

observation to analysis”. A 200mm diameter specimen can be

inserted. A 80mm height specimen can be observed.

The optional probe current detector can be

mounted just below the objective lens aperture for monitoring

probe current.

The Chamber scope can be mounted on the speci-

men chamber for monitoring the inside.

Crystal Orientation Analysis(EBSD : optional)

EDS (embedded in JSM-6490LA/JSM-6490A)

JEOL EDS is Embedded in Analysis Station

Specimen Exchange Airlock Chamber

(optional)

Large General-purpose Specimen

Chamber for High Precision Analysis

Probe Current Detector

(optional)

Chamber Scope (optional)

EBSD

WDS

EDS

Motor

control

Secondary

electron

detector

JSM-6490 series specimen chamber with EDS, WDS and EBSD.

Electron gun

Condenser lens

Specimen

Objective lens

Objective aperture

Probe current detector

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Sharp EL-6490 Manual de usuario Pagina 16

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