Sharp EL-6490 Manual de usuario descargar pdf (Pagina 17)

The Analysis Station is the new analysis system developed on the

concept of “seamless from observation to analysis”. The results of

analyses are always saved with SEM images of analysis areas.

You simply select a spot or an area of interest on the SEM monitor.

The EDS acquires an elemental spectrum followed by the acquisi-

tion of an SEM image showing the analysis area. You can set the

sequence to do the qualitative and quantitative analyses automati-

cally after the acquisition of a spectrum. The acquired data are

automatically stored with the SEM image in a folder, which is creat-

ed automatically for each analysis area.

SEM EDS

The MINI CUP detector is a high-performance

detector patented by JEOL. The Dewar of the

detector is pumped by the vacuum system of an

SEM prior to the filling of the detector with liquid

nitrogen. An ice film on the detector element

would absorb the low energy X-rays and lower

the sensitivity for the light elements. The water

vapor in the Dewar is also pumped out of the

MINI CUP detector so that the condensation of

ice on the detector is negligible. The MINI CUP

detector keeps its original high sensitivity for

many years. The detector requires liquid nitro-

gen only when the detector is in use. Therefore

the maintenance of the detector is easier.

Heat cycle of the MINI CUP detector

Hyper MINI CUP detector

Analysis Station Start an analysis on the SEM monitor

MINI CUP detector

Valve closed

X-ray

window

Detector

Specimen

chamber

MINI CUP detector in use

(cooled)

Liquid Nitrogen

Adsorbent

Valve open

Evacuation prior to

operation

Air removed from detector

Valve closed

Idle

(room temperature)

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Sharp EL-6490 Manual de usuario Pagina 17

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