Sharp EL-6490 Manual de usuario descargar pdf (Pagina 6)

Secondary electrons are suitable for observation of surface structures.

Backscattered electrons, which are generated simultaneously with sec-

ondary electrons, carry information on composition of specimen as well

as surface morphology.

Irradiation of a specimen with electrons generates secondary electrons,

backscattered electrons, and characteristic X-rays. Information from all

of these can be detected simultaneously when appropriate detectors

are mounted on an SEM.

JEOL patented High sensitivity backscattered electron detector can

generate composition, topography, and shadowed images simply with

a selection on the operation menu. The detector is mounted on the bot-

tom of the objective lens ready for observation. It is not necessary to

mount and remove the detector by a user.

Shadow image

Composition image

Topography image

Secondary electron image

Varistor 500

High Sensitivity Semiconductor Backscattered

Electron Detector

(JSM-6490/6490A : optional)

The Everhart-Thornley type secondary electron detector detects sec-

ondary electrons selectively since the energy of the secondary elec-

trons is less than 50eV.

Variety of Information Obtained

Information from a Specimen

Detection of Secondary Electrons

Backscattered

electron detector

Signal generation

from a specimen

Specimen

Backscattered

electron

Objective

lens

Backscattered

electron

detector

Backscattered

electron

Secondary

electron

Electron

scattering

range

X-ray

Specimen

Incident

electrons

Backscattered electron image 3kV Specimen: Diatom

1 2 3 4 5 6 7 8 9 10 11 ... 19 20

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Sharp EL-6490 Manual de usuario Pagina 6

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