Sharp EL-6490 Manual de usuario descargar pdf (Pagina 12)

Stereo images (Copper oxide) 20kV 6,000

Principle of eucentric specimen stage

Eucentric rotation

X-Y shift with tiltTilt

Eucentric Specimen Stage

The eucentric specimen stage has minimum shift of observa-

tion area and focus when tilting. The stage is suitable for

observation of a rough surface from a variety of directions.

You can observe depth by looking at a pair of stereo images

taken with a few degrees of tilt angle difference through a

stereo viewer. The eucentric specimen stage lets you take a

set of stereo image easily since focus and area changes are

small during tilting. Focus change during X, Y, or rotation shift-

ing of a specimen with some tilt is small so that surveying a

large specimen is done efficiently.

SMile station software shifts the specimen stage

over a user specified region and automatically stitches

these images to form a montage image.

Montage 109 images (512384 pixels each) Specimen : Butterfly

Specimen courtesy of Prof. Matsuda, Kumamoto National College of

Technology

The high conical shape of the objective lens provides great flex-

ibility in tilting a large specimen. Combination with the eucentric

specimen stage makes tilting of a specimen quite easy.

Super conical objective lens

SMile Station (optional)Tilting a Large Specimen

EDS

Super conical objective lens

EDS take off

angle 35



Specimen

WD=10mm

Specimen tilt

1 2 ... 7 8 9 10 11 12 13 14 15 16 17 18 19 20

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Sharp EL-6490 Manual de usuario Pagina 12