Sharp EL-6490 Manual de usuario descargar pdf (Pagina 3)

JEOL has improved the electron optics based on a belief

that high performance optics makes its operation easier.

The new super conical objective lens guarantees 3 nm res-

olution at 30 kV. A sharp image with good contrast makes

its operation comfortable.

The new scanning system lets you go down below 8 times

magnification. This low magnification improves efficiency of

specimen survey. The zoom condenser lens maintains

focus and area of interest so that you can optimize probe

current intuitively.

The new optics forms a small electron probe diameter with

large probe current for elemental analysis on a micro area.

JSM-6490 series SEMs employ the newly developed super

conical objective lens. The instrument produces superior

resolution at the analytical working distance of 10mm, as

the resolution is guaranteed at 8mm. The super conical

shape of the lens allows a large specimen to be tilted at the

analytical working distance.

Ease of Operation Based

on High Quality Optics

High Resolution

High Performance SEM for Large Specimen

Factory pre-centered

filament

Precision zoom

condenser lens

Wide angle

scanning coil

Super conical

objective lens

0.1␮m

0.5␮m

1␮m

0.5␮m0.5␮m

1␮m

0.5␮m

1␮m1␮m

High brightness

electron gun

Gold evaporated particles 30kV (3nm)

Gold evaporated particles 3kV (8nm)

Gold evaporated particles 1kV (15nm)

1 2 3 4 5 6 7 8 ... 19 20

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Sharp EL-6490 Manual de usuario Pagina 3