Sharp R-880F Manual de instrucciones descargar pdf (Pagina 5)

EXT Split Flow Compound Turbomolecular Pumps

PAGE

Mar 07 i Issue F

CONTENTS

Section Page

1INTRODUCTION 1

1.1 Scope and definitions 1

2 TECHNICAL DATA 3

2.1 General 3

2.2 Pumping media 3

2.3 Vent gas specification and vent control data 4

2.4 Water-cooling 4

2.5 Materials exposed to gases pumped 7

3INSTALLATION 11

3.1 Unpack and inspect 11

3.2 Typical installation 12

3.3 Connection to the vacuum system 13

3.3.1 Mechanical fixing 13

3.3.2 Inlet-screens (supplied fitted) 14

3.3.3 Inlet connection and orientation 14

3.3.4 Backing connection 15

3.3.5 Interstage connection (Hi pump variants only) 16

3.4 Vent options, vent valve connection and control 16

3.5 Electrical installation 17

3.5.1 EXDC Controllers 17

3.5.2 EXC Controllers 17

3.6 Cooling 18

3.6.1 Introduction 18

3.6.2 Forced-air cooling 18

3.6.3 Water-cooling 18

4OPERATION 19

4.1 Start-up 19

4.2 Shut-down 20

4.3 Safety interlocks and control system 20

4.3.1 EXDC Controllers 20

4.3.2 EXC Controllers 20

5 MAINTENANCE 21

5.1 Introduction 21

5.2 Bearing maintenance 21

5.3 Rotor life 21

5.4 Cleaning the pump 22

5.5 Fault finding 22

6 STORAGE AND DISPOSAL 27

6.1 Storage 27

6.2 Disposal 27

dcs/7506/0307

1 2 3 4 5 6 7 8 9 10 ... 41 42

Comentarios a estos manuales

Sin comentarios

Sharp R-880F Manual de instrucciones Pagina 5

Comentarios a estos manuales

Relacionado con productos y manuales para Microondas Sharp R-880F